Development technology for Cathode and Ring, etc. for 18-inch wafer
(Processing / Cleaning)

Development technology for GDP and Ring, etc. for 18-inch wafer
(Processing / Cleaning)

SiC Boat development technology
(Slot processing / CVD coating / Pedestal processing)

New RB SiC development technology
(Materials manufacturing / Processing)

AlN Heater development technology
(Body manufacturing / Body shaft binding / Processing)

ESC development technology
(Materials / Coating / Processing / Heterogeneous binding)

Si₃N₄ development technology
(Silicon powder development / Optimization of processing conditions / Laminated circuit board manufacturing)

YAS development technology
(Frit manufacturing / Materials processing)